JPH0543471Y2 - - Google Patents

Info

Publication number
JPH0543471Y2
JPH0543471Y2 JP1988136028U JP13602888U JPH0543471Y2 JP H0543471 Y2 JPH0543471 Y2 JP H0543471Y2 JP 1988136028 U JP1988136028 U JP 1988136028U JP 13602888 U JP13602888 U JP 13602888U JP H0543471 Y2 JPH0543471 Y2 JP H0543471Y2
Authority
JP
Japan
Prior art keywords
substrate
reaction chamber
phase growth
vapor phase
front chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988136028U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0256433U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988136028U priority Critical patent/JPH0543471Y2/ja
Publication of JPH0256433U publication Critical patent/JPH0256433U/ja
Application granted granted Critical
Publication of JPH0543471Y2 publication Critical patent/JPH0543471Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988136028U 1988-10-18 1988-10-18 Expired - Lifetime JPH0543471Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988136028U JPH0543471Y2 (en]) 1988-10-18 1988-10-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988136028U JPH0543471Y2 (en]) 1988-10-18 1988-10-18

Publications (2)

Publication Number Publication Date
JPH0256433U JPH0256433U (en]) 1990-04-24
JPH0543471Y2 true JPH0543471Y2 (en]) 1993-11-02

Family

ID=31396161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988136028U Expired - Lifetime JPH0543471Y2 (en]) 1988-10-18 1988-10-18

Country Status (1)

Country Link
JP (1) JPH0543471Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6066028U (ja) * 1983-10-11 1985-05-10 関西日本電気株式会社 炉芯管
JPS60119743U (ja) * 1984-01-23 1985-08-13 サンケン電気株式会社 化学的気相付着装置

Also Published As

Publication number Publication date
JPH0256433U (en]) 1990-04-24

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